view_precis.jpgThe all-new Precis® 200 incorporates the most advanced design and technology from VIEW. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable:

  • Extended Z-axis range – 2.5mm, 5mm or 100mm
  • Transmitted illumination
  • Integral electronics drawer – fully compliant with SEMI S2 and CE standards
  • Ergonomic operator control station with hide-away keyboard tray, adjustable height and angle for control panel and display monitor, SEMI S8 compliant
  • Fully automated microscope with all settings computer controlled
  • Megapixel camera for optimum resolution
  • VIEW Metrology Software (VMS™) allows a wide range of components to be measured, with the option of CAD translation and full geometric dimensioning and tolerancing.
  • MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.

Specifications

 StandardOptional
X,Y,Z Travel200x200x5 mm200x200x100 mm
Load Capacity12 kg
Imaging OpticsMicroscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, and camera back tube
Front Lens (Field Interchangable)10X Bright Field
50X Long Working Distance, Bright Field
5X Bright Field or Bright Field/Dark Field
10X Bright Field or Bright Field/Dark Field
20X Long Working Distance, Bright Field or Bright Field/Dark Field
50X Long Working Distance, Bright Field or Bright Field/Dark Field
100X Long Working Distance, Bright Field or Bright Field/Dark Field
Metrology Camera1.4 megapixel, 1/2 inch, digital monochrome2.0 megapixel, digital, monochrome
IlluminationAll LED coaxial through-the-lens surface light and below-the-stage back lightMulti-color programmable ring light
Grid autofocus system
Sensor Options Integrated photo spectrometer for photoresist and thin film thickness measurements

Datasheet

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VIEW systems are manufactured by Quality Vision International in Rochester, New York.