Ensure precision motion and motion detection

Measure a wide variety of critical dimensions on MEMS devices, including pitch, width, and spacing of flexures, fingers, combs, arcs, circle diameters, and center locations. Because of the myriad of requirements for MEMS devices, they can range from a few microns in size to a few millimeters. The key aspect of MEMS devices is that they incorporate moving components. A MEMS device must either cause one of its components to move, or allow a component to move based on external influence, and then sense that motion. The moving component of a MEMS device typically employs a flexure, and detection of the motion often involves sets of interleaved "fingers" or "combs." For precise motion and motion detection, knowing the dimensions of the flexures and motion detection components is critical.

Micro-Elecro-Mechanical Systems (MEMS) Measurement  Micro-Elecro-Mechanical Systems (MEMS) Measurement

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