Critical Dimension Measurement Systems

Seeing and measuring the impossible

VIEW Micro-Metrology offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.


Pinnacle Benchmark Benchmark
Pinnacle 250 Pinnacle 250

A high throughput, high-accuracy dimensional metrology system

Benchmark 250 Benchmark 250

A compact, high-accuracy dimensional measurement system

Benchmark 450 Benchmark 450

Exceptional value in a high-accuracy dimensional measurement system

MicroLine Precis Summit
MicroLine MicroLine 300

Offers exceptional linewidth and overlay measurement capability

Precis 200 Precis 200

Delivers sub-micron field-of-view and point-to-point measurement accuracy

Summit 450/600/800 Summit 450/600/800

A large travel, high-accuracy dimensional measurement system

VIEW Micro-Metrology provides many services including installation and training when purchasing a new system. Read More >