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Critical Dimension Measurement Systems


Seeing and measuring the impossible

VIEW Micro-Metrology offers a full line of optical metrology systems for wafer, slider, MEMS and micro-component process measurements.

The MicroLine series offers exceptional linewidth and overlay measurement capability with a choice of semi-automatic, fully automated single-wafer and fully automated cassette to cassette operation.

The IMS system provides outstanding accuracy and repeatability for applications requiring point-to-point coordinate measurements on smaller wafers. The IMS-44 is the world standard for hard disk recording head air bearing feature measurements.

The Innova 200 system provides outstanding accuracy and repeatability for point-to-point measurements on wafers up to 200mm.

The new Precis 200 system is our most advanced system, offering a wide array of features for CD and point to point measurements on wafers masks and micro-components.

VIEW Micro-Metrology Systems

MicroLine Series
MicroLine Series
IMS-44
IMS-44
Innova
Innova
Precis
Precis