Inspection of data storage flexure suspension assemblies requires extremely accurate and repeatable metrology capabilities, along with special features such as integrated laser auto-focus, versatile lighting, multiple magnifications, and highly programmable functionality. The accurate measurement of factors such as pitch, roll angles, load beam symmetry/perpendicularity, dimple height/location, flatness, boss diameter, profile, and tab distance also requires the flexibility to inspect parts at various in-process steps as well as at final inspection.