Leadframe inspection presents a wide variety of feature sizes and geometry, requiring metrology systems that can be flexibly programmed for fast and accurate three-dimensional measurements. Die-to-pad placement/alignment, lead positions/sizes, lead tilt and twist angles, pitch, lead widths, lead-coplanarity, and dam-bar dimensions all represent critical factors that must be tightly controlled. These application requirements generally need stable floor-stand metrology platforms with medium to large stage sizes, fast stage travel, and either fast auto-focus or laser options for high-speed inspection.