Measure gate plate diameters as small as a micron

Manufacturing Field Emitter Displays (FEDs) and ensuring the precision and quality of their fabricated components presents a daunting challenge. One such challenge involves precisely measuring hole diameters and roundness in a FED gate plate with accuracy of ± 0.01 µm or better. To accomplish this, the VIEW Micro-Metrology system analyzes the pixels within the measurement window and builds a radial intensity profile of the circle. High-precision non-contact measurement in an FED production environment results in faster and more accurate measurements with a higher repeatability than a Scanning Electron Microscope (SEM).